METHOD OF MAKING PHOTO MASK BLANK MATERIAL,申请号JP19760104961-传众专利搜索

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发明名称	METHOD OF MAKING PHOTO MASK BLANK MATERIAL
摘要
申请公布号	JPS5331401(A)	申请公布日期	1978.03.24
申请号	JP19760104961	申请日期	1976.09.03
申请人	NIPPON CHEMICAL IND	发明人	KAMEYAMA MASAOMI
分类号	G03C5/00;G03F1/00;G03F1/54;G03F7/004;H01L21/00;H01L21/027	主分类号	G03C5/00
代理机构		代理人
主权项
地址

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