COATING METHOD OF TUBE INSIDE BY ION BEAM,申请号JP19760106293-传众专利搜索

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发明名称	COATING METHOD OF TUBE INSIDE BY ION BEAM
摘要	PURPOSE:To uniformly coat the inside of long small diameter tube, by providing freely revolvable magnet, giving revolving magnetic field to ion beams, irradiated on the outer circumference of long small diameter tube and moving it.
申请公布号	JPS5331581(A)	申请公布日期	1978.03.24
申请号	JP19760106293	申请日期	1976.09.07
申请人	ULVAC CORP	发明人	HAYASHI CHIKARA
分类号	C23C14/32;C23C14/04;C23C14/24	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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