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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5330271(A)
申请公布日期
1978.03.22
申请号
JP19760104480
申请日期
1976.09.01
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
OZAWA SHIGERU
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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