| 发明名称 |
Beam splitter for electron beam machines |
| 摘要 |
A beam splitter for electron beam machines with a beam splitter grid which is to be set crossways to the beam and which has a row of cross-pieces running next to one another with uniform spaces for shading the portions of beam striking it, where the cross-piece materials is replaceable in operation by cross-piece material not already acted on by the beam.
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| 申请公布号 |
US4080546(A) |
申请公布日期 |
1978.03.21 |
| 申请号 |
US19750619706 |
申请日期 |
1975.10.06 |
| 申请人 |
STEIGERWALD STRAHLTECHNIK GMBH |
发明人 |
STEIGERWALD, KARL HEINZ;KONIG, DIETER;SCHEFFELS, WILHELM;SPECK, RUDOLF;STAMM, WOLFGANG |
| 分类号 |
H01J37/31;B23K15/08;(IPC1-7):H01J1/46;H01J1/52;H01J17/04;H01J17/12 |
主分类号 |
H01J37/31 |
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