Electron beam machining apparatus of the dynamic seal type

摘要

Electron beam machining apparatus of the dynamic seal type, characterized by upper and lower fixed plates for fixedly clamping a workpiece therebetween, which plates define upper and lower vacuum chambers; a movable plate disposed on said upper fixed plate so as to be movable in the working direction, said plate defining a movable chamber which communicates with said upper vacuum chamber, said upper and lower vacuum chambers and the movable chamber providing a working chamber of the apparatus; inflatable seal members for said upper and lower vacuum chambers; said upper and lower plates defining auxiliary vacuum chambers located outwardly of and encircling their respective fixed vacuum chambers, an upper wall of said upper vacuum chamber defining an opening in the form of a V-shaped groove which extends in the working direction of V-belt seal, and by a belt seal guide tube mounted on said movable plate and extending in the working direction, to enclose the electron gun, said V-belt fitting into said groove in front of and to the rear of said guide tube, but passing upwardly out of the vacuum chamber and through said guide tube whereby an effective seal is maintained around the electron gun during movement of the movable plate for a machining operation.