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发明名称
PLASMA REACTOR
摘要
申请公布号
JPS5329285(A)
申请公布日期
1978.03.18
申请号
JP19770102484
申请日期
1977.08.26
申请人
TETRONICS RES & DEV CO LTD
发明人
JIYOSEFU KAJIIMIERUTSU TEIRUKO
分类号
C22B21/02;B01J19/08;C01B33/02;C01B33/021;C22B4/00;C22B26/20;C22B26/22;H05H1/26
主分类号
C22B21/02
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代理人
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