发明名称 |
SETT ATT FRAMSTELLA HALVLEDARE |
摘要 |
PURPOSE:To secure a cutting with a blade formed in a prescribed shape and without any glass exfoliation for the mesa groove in which a glass film featurin a different heat expansion coefficient from the semiconductor substrate is formed. |
申请公布号 |
SE7707855(L) |
申请公布日期 |
1978.03.17 |
申请号 |
SE19770007855 |
申请日期 |
1977.07.05 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
FUJII T;MIHARA K;HOKUYO S;ISHIBASHI Y |
分类号 |
H01L21/301;H01L21/302;H01L21/78;(IPC1-7):H01L21/30 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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