发明名称 SETT ATT FRAMSTELLA HALVLEDARE
摘要 PURPOSE:To secure a cutting with a blade formed in a prescribed shape and without any glass exfoliation for the mesa groove in which a glass film featurin a different heat expansion coefficient from the semiconductor substrate is formed.
申请公布号 SE7707855(L) 申请公布日期 1978.03.17
申请号 SE19770007855 申请日期 1977.07.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 FUJII T;MIHARA K;HOKUYO S;ISHIBASHI Y
分类号 H01L21/301;H01L21/302;H01L21/78;(IPC1-7):H01L21/30 主分类号 H01L21/301
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