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发明名称
摘要
申请公布号	FR2287778(B1)	申请公布日期	1978.03.17
申请号	FR19750030683	申请日期	1975.10.07
申请人	TOKYO SHIBAURA ELECTRIC CO LTD	发明人
分类号	H03H9/145;C30B29/30;H01L41/18;H03H3/08;(IPC1-7):01L41/10;03H9/14	主分类号	H03H9/145
代理机构		代理人
主权项
地址

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