| 发明名称 |
PRODUCTION OF SEMICONDUCTOR DEVICE |
| 摘要 |
<p>PURPOSE:To shorten the time for isolation region formation and prevent the cracking of substrate by beforehand providing grooves in the portions of a semiconductor substrate for forming isolating regions therein.</p> |
| 申请公布号 |
JPS5329086(A) |
申请公布日期 |
1978.03.17 |
| 申请号 |
JP19760103889 |
申请日期 |
1976.08.30 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
KAWAKAMI MINORU |
| 分类号 |
H01L21/301;H01L21/78;H01L29/74 |
主分类号 |
H01L21/301 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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