ETCHING OF TANTALUM LAYERS,申请号GB19760010433-传众专利搜索

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发明名称	ETCHING OF TANTALUM LAYERS
摘要
申请公布号	GB1504264(A)	申请公布日期	1978.03.15
申请号	GB19760010433	申请日期	1976.03.16
申请人	SIEMENS AG	发明人
分类号	H01C13/00;H01C17/06;H01G4/005;H01G4/06;H01G4/10;H01G9/04;H01L21/70;H01L49/02;(IPC1-7):C23F1/02;H01G1/01	主分类号	H01C13/00
代理机构		代理人
主权项
地址

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