PURPOSE:To improve the detecting sensitivity and accordingly the analyzing precision by making variable the width of the slit of an analyzing section of an analyzer using secondary ions and by insulating the leading end of the analyzer.
申请公布号
JPS5327486(A)
申请公布日期
1978.03.14
申请号
JP19760101660
申请日期
1976.08.27
申请人
HITACHI LTD
发明人
DOI HIROSHI;HAYAKAWA KASUNOBU;KAWASE SUSUMU;ICHIKAWA MASAKAZU
