发明名称 Piezoelectric substrate fabrication process
摘要 A method of fabricating a lead titanate piezoelectric surface acoustic wave substrate comprises combining lead oxide, titanium tetra-n-butoxide, lanthanum oxide, and manganese dioxide, with a hydrocarbon solvent and adding water to the combination to form a slurry in which titanium polyester is precipitated unto the lead oxide and lanthanum and manganese oxides. The slurry is dried by heating to a temperature sufficient to remove the liquids therefrom but below the temperature at which an exothermic reaction between the included hydrogen, oxygen and carbon occurs. A first calcining operation produces the exothermic reaction and forms lead titanate after which the lead titanate is heated to and maintained at a temperature above that produced by the exothermic reaction. The lead titanate is then ground to produce powdered lead titanate and a second calcining is carried out to produce structural annealing of the powdered lead titantate. Binder materials are added and the combination of powdered lead titanate and binder materials is cold-pressed into substantially planar substrates. After removal of the binders by heating, the substrates are fired to reduce porosity and poled to impart a piezoelectric characteristic.
申请公布号 US4078284(A) 申请公布日期 1978.03.14
申请号 US19770784293 申请日期 1977.04.04
申请人 ZENITH RADIO CORPORATION 发明人 CAPEK, RAYMOND G.;KOSS, ANN A.;TAKAHASHI, FRANK T.
分类号 H01L41/187;H01L41/24;(IPC1-7):H01L41/22 主分类号 H01L41/187
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