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发明名称
SELECTIVE ETCHING METHOD
摘要
申请公布号
JPS5327368(A)
申请公布日期
1978.03.14
申请号
JP19760102315
申请日期
1976.08.26
申请人
FUJITSU LTD
发明人
SHIRAI KAZUNARI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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