| 发明名称 |
OBSERVING METHOD OF ION BEAM RADIATI ON POINT POSITIONS |
| 摘要 |
PURPOSE:To facilitate radiation point positioning of a primary ion beam at specimen surface by radiating a primary electron beam while scanning it at the time of or after radiation of a primary ion beam. |
| 申请公布号 |
JPS5326193(A) |
申请公布日期 |
1978.03.10 |
| 申请号 |
JP19760099719 |
申请日期 |
1976.08.23 |
| 申请人 |
HITACHI LTD |
发明人 |
KAWASE SUSUMU;HAYAKAWA KASUNOBU;ISHIKAWA KIYOSHI;DOI HIROSHI;ITOU TOSHIYASU;GOTOU SUMITAKA;ICHIKAWA MASAKAZU |
| 分类号 |
G01N23/225 |
主分类号 |
G01N23/225 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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