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经营范围
发明名称
WIRING METHOD OF LSI
摘要
申请公布号
JPS5325382(A)
申请公布日期
1978.03.09
申请号
JP19760099707
申请日期
1976.08.23
申请人
HITACHI LTD
发明人
KANOU HIROSHI
分类号
H01L21/82;H01L21/822;H01L27/04;H01L27/118
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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