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经营范围
发明名称
PHOTOOETCHING METHOD
摘要
申请公布号
JPS5325243(A)
申请公布日期
1978.03.08
申请号
JP19760098682
申请日期
1976.08.20
申请人
HITACHI LTD
发明人
KOIKE AKIO;SUMINO YOSHIAKI;TAKAYANAGI TOSHIHIKO
分类号
C23F1/00;C23F1/02;G03F7/20;H01L21/027;H01L21/302
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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