,申请号JP19760108978U-传众专利搜索

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发明名称
摘要
申请公布号	JPS5326584(U)	申请公布日期	1978.03.07
申请号	JP19760108978U	申请日期	1976.08.14
申请人		发明人
分类号	B24B27/06;H01L21/00;H01L21/301;H01L21/302;(IPC1-7):H01L21/00	主分类号	B24B27/06
代理机构		代理人
主权项
地址

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