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发明名称
TEST MATERIAL EXCHANGE DEVICE FOR ELECTRONIC MICRO SCOPE* OR THE LIKE
摘要
申请公布号
JPS5324263(A)
申请公布日期
1978.03.06
申请号
JP19760098161
申请日期
1976.08.19
申请人
HITACHI LTD
发明人
KUBOZOE MORIKI;KATAGIRI SHINJIROU;UNNO YOSHIMASA
分类号
H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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