ELECTORON RAY EXPOSURE DEVICE,申请号JP19760097024-传众专利搜索

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发明名称	ELECTORON RAY EXPOSURE DEVICE
摘要
申请公布号	JPS5323280(A)	申请公布日期	1978.03.03
申请号	JP19760097024	申请日期	1976.08.16
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	TAKIGAWA TADAHIRO
分类号	H01L21/027;H01L21/26	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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