| 发明名称 |
HANGER FOR WAFER SUSCEPTOR |
| 摘要 |
PURPOSE:To prolong the service life to hangers and prevent the degradation in wafer characteristics by covering the main outside portion of metal hanger part with quartz and spouting non-corrosive gas from the inside to provide protection. |
| 申请公布号 |
JPS5322372(A) |
申请公布日期 |
1978.03.01 |
| 申请号 |
JP19760096037 |
申请日期 |
1976.08.13 |
| 申请人 |
HITACHI LTD |
发明人 |
WATANABE KAZUHIKO;ISHIHARA TAKAO |
| 分类号 |
H01L21/683;C23C16/44;C23C16/458;C30B25/12;H01L21/205;H01L21/22;H01L21/31 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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