| 摘要 |
PURPOSE:To prevent the generation of the complicatedness in manufacturing and the irregularity in performance by integrally forming a plurality of bimorph type electrostriction elements arranged in an almost fan shape by utilizing photolithography. CONSTITUTION:A plurality of bimorph type electrostriction vibrators 11 are integrally formed on the concentric circles of a conductive metal substrate 1 at the same positions on both surfaces of said substrate 1 in a fan or almost equilateral triangular shape of which the apex is directed to the center by utilizing screen printing or photolithography. Next, the punching of an outer shape and the separation of the electrostriction elements 11 at every element unit are simultaneously performed by photoetching or punching so as to leave only necessary parts. Subsequently, wires are fixed to the electrostriction elements 11 at almost right angles to the surfaces of the apex leading ends of said electrostriction elements 11. Because the bimorph type electrostriction elements radially arranged on the concentric circuit are integrally molded by utilizing photolithography as mentioned above, a large number of printing heads having no irregularity in performance can be simply manufactured at once. |
