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发明名称
PRODUCTION OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS5320874(A)
申请公布日期
1978.02.25
申请号
JP19760094867
申请日期
1976.08.11
申请人
HITACHI LTD
发明人
SHIMIZU ISAO
分类号
H01L21/761;H01L21/331;H01L21/76;H01L29/70;H01L29/73
主分类号
H01L21/761
代理机构
代理人
主权项
地址
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