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经营范围
发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5319770(A)
申请公布日期
1978.02.23
申请号
JP19760094318
申请日期
1976.08.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAKAMI AKIRA
分类号
H01L27/06;H01L21/329;H01L21/331;H01L21/822;H01L29/72;H01L29/73;H01L29/74
主分类号
H01L27/06
代理机构
代理人
主权项
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