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发明名称
Optical measuring device
摘要
申请公布号
US4074937(A)
申请公布日期
1978.02.21
申请号
US19760656177
申请日期
1976.02.09
申请人
ZYGO CORPORATION
发明人
ZANONI, CARL A.
分类号
G01B9/02;(IPC1-7):G01B9/02;G01B11/26
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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