| 发明名称 |
REMOVING METHOD OF FAULTY SEMICONDUCTOR PELLETS |
| 摘要 |
<p>PURPOSE:To simplify the mechanism and action of pellet removal and save the working hours, by blowing off the pellet with high-pressure gas.</p> |
| 申请公布号 |
JPS5318953(A) |
申请公布日期 |
1978.02.21 |
| 申请号 |
JP19760093869 |
申请日期 |
1976.08.05 |
| 申请人 |
NIPPON ELECTRIC CO |
发明人 |
AOYAMA HIROSHI |
| 分类号 |
H01L21/67;H01L21/00;H01L21/301;H01L21/68 |
主分类号 |
H01L21/67 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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