DRY-ETCHING DEVICE,申请号JP19880058480-传众专利搜索

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发明名称	DRY-ETCHING DEVICE
摘要
申请公布号	JPH01232725(A)	申请公布日期	1989.09.18
申请号	JP19880058480	申请日期	1988.03.14
申请人	OKI ELECTRIC IND CO LTD	发明人	MATSUI TAKAYUKI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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