DRIVANORDNING, SPECIELLT FOR ANVENDNING VID EN AVSOKNINGSANORDNING FOR FRAMSTELLNING AV MASKER FOR MIKROKRETSAR

摘要

A scanning device for providing rapid accurate mechanical line scanning of a preferably flat surface includes a radiation source, a radiation sensitive medium and apparatus for providing relative movement between the radiation source and the medium. The apparatus includes a driving device and a slide structure which is designed to oscillate at substantially its self resonant frequency in order to increase accuracy of operation.