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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5317284(A)
申请公布日期
1978.02.17
申请号
JP19760092615
申请日期
1976.07.31
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
UENO ATSUSHI
分类号
H01L29/78;H01L21/28;H01L21/31;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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