发明名称 EVAPORATION APPARATUS
摘要 PURPOSE:To dispense with the slit exchange by dirts, together with to improve the utiliziation coefficient of metal, by heating the slit a little higher temperature than the melting point of evaporated metal and dropping down the liquid metal from the central part of the slit.
申请公布号 JPS5317582(A) 申请公布日期 1978.02.17
申请号 JP19760091354 申请日期 1976.08.02
申请人 HITACHI LTD 发明人 YAMADA KIMIO;OZAKI NORIHIKO;YAMAMOTO MANABU;KAMIYANAGI KIICHI
分类号 C23C14/30;C23C14/24 主分类号 C23C14/30
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