*,申请号JP19760090181-传众专利搜索

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发明名称	*
摘要
申请公布号	JPS5316577(A)	申请公布日期	1978.02.15
申请号	JP19760090181	申请日期	1976.07.30
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	TANAKA KUNIYOSHI;NAKASUJI MAMORU;WASHIMI MASAHIKO
分类号	H01L21/027;H01L21/26	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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