发明名称 |
MASKING PROCESS WITH CONSTRICTED FLOW PATH FOR COATING |
摘要 |
<p>A masking process, during the vapor deposition coating of a partially masked substrate with a condensible vaporous precursor of a coating material, which comprises causing the vaporous precursor to flow through a constricted flow path at the masked/unmasked interface during the coating process so as to provide a relatively thin coating at the end of the flow path which can be used as a tear line for removing the coating masking means along such interface.</p> |
申请公布号 |
CA1026172(A) |
申请公布日期 |
1978.02.14 |
申请号 |
CA19740197579 |
申请日期 |
1974.04.16 |
申请人 |
UNION CARBIDE CORPORATION |
发明人 |
HOFER, PETER H. |
分类号 |
C23C14/12;H01L49/02;H05K3/06;H05K3/28;H05K3/46;(IPC1-7):05K3/28 |
主分类号 |
C23C14/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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