发明名称 MASKING PROCESS WITH CONSTRICTED FLOW PATH FOR COATING
摘要 <p>A masking process, during the vapor deposition coating of a partially masked substrate with a condensible vaporous precursor of a coating material, which comprises causing the vaporous precursor to flow through a constricted flow path at the masked/unmasked interface during the coating process so as to provide a relatively thin coating at the end of the flow path which can be used as a tear line for removing the coating masking means along such interface.</p>
申请公布号 CA1026172(A) 申请公布日期 1978.02.14
申请号 CA19740197579 申请日期 1974.04.16
申请人 UNION CARBIDE CORPORATION 发明人 HOFER, PETER H.
分类号 C23C14/12;H01L49/02;H05K3/06;H05K3/28;H05K3/46;(IPC1-7):05K3/28 主分类号 C23C14/12
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