ELECTRON BEAM DEFLECTION CONTROLLING APPARATUS,申请号JP19760089056-传众专利搜索

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发明名称	ELECTRON BEAM DEFLECTION CONTROLLING APPARATUS
摘要
申请公布号	JPS5315077(A)	申请公布日期	1978.02.10
申请号	JP19760089056	申请日期	1976.07.28
申请人	NIPPON TELEGRAPH & TELEPHONE	发明人	IWATA ATSUSHI;FUJINAMI AKIHEI;SHIBAYAMA AKINORI
分类号	H01L21/027;H01L21/26	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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