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经营范围
发明名称
FINE PATTERNING METHOD
摘要
申请公布号
JPS5313880(A)
申请公布日期
1978.02.07
申请号
JP19760087974
申请日期
1976.07.23
申请人
NIPPON ELECTRIC CO
发明人
URAI HARUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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