发明名称 Regeneration-type cryopump
摘要 The invention relates to a regeneration-type cryopump which has an annular reservoir for liquid nitrogen situated above an annular reservoir for liquid helium and incorporates, sliding in the central opening in the said reservoir, a valve member which is mounted on a rod. When the valve member is in one position, the cryopump is in normal operation, whereas when the valve member is in another position and rests against a seating, regeneration may take place.
申请公布号 US4072025(A) 申请公布日期 1978.02.07
申请号 US19760712916 申请日期 1976.08.09
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 发明人 THIBAULT, JEAN-JACQUES
分类号 F04B37/08;(IPC1-7):B01D5/00 主分类号 F04B37/08
代理机构 代理人
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