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发明名称
VAPOR PHASE REACTION OF SEMICONDUCTOR WAFER
摘要
申请公布号
JPS5313356(A)
申请公布日期
1978.02.06
申请号
JP19760087498
申请日期
1976.07.22
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TSUBURAYA SHIYOUJI
分类号
C30B25/02;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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