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发明名称
EQUIPMENT FOR THIN FILM FORMING
摘要
申请公布号
JPS5310640(A)
申请公布日期
1978.01.31
申请号
JP19760085095
申请日期
1976.07.19
申请人
HITACHI LTD
发明人
MATSUZAKI HIDEO;ISHITANI SHIZUO
分类号
B05C3/09;B29C31/00;B29C41/00;B29C41/14;B29C41/52
主分类号
B05C3/09
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代理人
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