发明名称 Apparatus and method for controlling oscillation output of magnetron
摘要 An apparatus for controlling an oscillation output of a magnetron includes a switch circuit controlled of ON/OFF states thereof by a pulse signal, a rectifying circuit for supplying microwave power pulses to the magnetron, and a transformer having a primary side and a secondary side. The primary side has a first terminal and a second terminal, where the first terminal is connected to an A.C. power supply, the second terminal is connected to the switch circuit. The secondary side is connected to the rectifying circuit. The switch circuit is turned ON/OFF by the pulse signal so that a duty factor of the microwave power pulses output from the rectifying circuit and a repetition frequency of the duty cycle thereof become constant.
申请公布号 US5395453(A) 申请公布日期 1995.03.07
申请号 US19940215810 申请日期 1994.03.22
申请人 FUJITSU LIMITED 发明人 NODA, SHOZO
分类号 C23C16/50;C23C16/511;C23C16/515;H01J37/32;H01L21/302;H01L21/3065;H01L21/31;H03B9/10;H05B6/66;(IPC1-7):C23C16/50 主分类号 C23C16/50
代理机构 代理人
主权项
地址