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发明名称
DISPOSITIVO PER AGGIUSTARE LASTRE DI MATERIALE SEMICONDUTTORE RISPET TO AD UNA MASCHERA DI IRRAGGIAMEN TO PER PRODURRE UNA STRUTTURA IN FOTOVERNICI CON ESPOSIZIONE A RAG GI
摘要
申请公布号
IT1021303(B)
申请公布日期
1978.01.30
申请号
IT19740027200
申请日期
1974.09.12
申请人
SIEMENS AG
发明人
分类号
G01B11/00;G03F9/00;H01L21/00;H01L21/027;(IPC1-7):H01L/
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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