发明名称 |
VORRICHTUNG ZUM ZIEHEN EINES EINKRISTALLINEN KOERPERS AUS EINEM SCHMELZFILM |
摘要 |
An apparatus for pulling a monocrystalline ribbon-like body from a molten crystalline film via the EFG-process wherein a shaping or profile component having a capillary tube extending therethrough is positioned in contact with a crystalline melt so that a molten crystalline film forms on top of such component and a desired crystalline body is pulled therefrom. Surfaces of the profiling component in contact with the crystalline melt are composed of a material chemically inert with the crystalline melt, such as BeO or sapphire. |
申请公布号 |
DE2632614(A1) |
申请公布日期 |
1978.01.26 |
申请号 |
DE19762632614 |
申请日期 |
1976.07.20 |
申请人 |
SIEMENS AG |
发明人 |
ZERBST,MANFRED,DR.PHIL.NAT. |
分类号 |
C30B15/34;H01L21/208;(IPC1-7):01J17/18 |
主分类号 |
C30B15/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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