发明名称 VORRICHTUNG ZUM ZIEHEN EINES EINKRISTALLINEN KOERPERS AUS EINEM SCHMELZFILM
摘要 An apparatus for pulling a monocrystalline ribbon-like body from a molten crystalline film via the EFG-process wherein a shaping or profile component having a capillary tube extending therethrough is positioned in contact with a crystalline melt so that a molten crystalline film forms on top of such component and a desired crystalline body is pulled therefrom. Surfaces of the profiling component in contact with the crystalline melt are composed of a material chemically inert with the crystalline melt, such as BeO or sapphire.
申请公布号 DE2632614(A1) 申请公布日期 1978.01.26
申请号 DE19762632614 申请日期 1976.07.20
申请人 SIEMENS AG 发明人 ZERBST,MANFRED,DR.PHIL.NAT.
分类号 C30B15/34;H01L21/208;(IPC1-7):01J17/18 主分类号 C30B15/34
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