| 发明名称 |
Gap measuring device for defining the distance between two or more surfaces |
| 摘要 |
Disclosed is an apparatus for measuring the distance between two or more surfaces by means of a periodically shiftable imaging system and focus detectors.
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| 申请公布号 |
US4070116(A) |
申请公布日期 |
1978.01.24 |
| 申请号 |
US19760695293 |
申请日期 |
1976.06.11 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FROSCH, ALBERT;MANNSDORFER, WALTER;SCHEUING, CLAUS |
| 分类号 |
G01B11/14;(IPC1-7):G01B9/00 |
主分类号 |
G01B11/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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