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发明名称
ETCHING METHOD
摘要
申请公布号
JPS537548(A)
申请公布日期
1978.01.24
申请号
JP19760080830
申请日期
1976.07.09
申请人
FUJITSU LTD
发明人
YAMASHITA MITSUO;UMEMOTO SHINJI;KUROSAWA KEIJI;NAKAMURA HITOSHI;TEZUKA MASAHIRO
分类号
C23F1/00;H01L49/02;H05K3/06
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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