PROBE PIN AND PROBING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a probe card having long service life in which the positional accuracy at the tip of probe pin can be sustained even after repetition of several hundreds thousand times - several millions times of probing and defective conduction is prevented. SOLUTION: The probe pin comprises a conductive film 5 provided on the surface of an acicular single crystal 3 wherein a relationship t.L<3> /D<4> <=5.3×10<4> is satisfied among the length L(μm) and the diameter D(μm) of the acicular single crystal 3 and the thickness t(μm) of the conductive film 5 provided on the surface of the acicular single crystal. Preferably, the acicular single crystal is Si and the conductive film 5 is composed of Au. In the inventive probing method, the probe pin touches an object with an overdrive amount of 50μm or less.