| 发明名称 |
LIQUIDDPHASE EPITAXIAL GROWTH METHOD |
| 摘要 |
PURPOSE:To have a continuous growth of different epitaxial layers without taking in and out of the substrate by dividing the growth boat in the upper, middle and lower parts with two upper and lower sliding plates containing small holes. |
| 申请公布号 |
JPS535569(A) |
申请公布日期 |
1978.01.19 |
| 申请号 |
JP19760080494 |
申请日期 |
1976.07.05 |
| 申请人 |
SANYO ELECTRIC CO |
发明人 |
NIINA TATSUHIKO;YAMAGUCHI TAKAO |
| 分类号 |
C30B19/00;H01L21/208;H01L33/30 |
主分类号 |
C30B19/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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