| 摘要 |
PROBLEM TO BE SOLVED: To obtain a standard pattern inspecting apparatus minimizing the necessity for moving an optical system and having conventional stability. SOLUTION: A non-contact thin film inspecting apparatus is equipped with a standard pattern member 20 wherein a patterned surface is provided on a substrate, the holder 30 for holding the standard pattern member 20, a table 13 on which the holder 30 and a thin film object 21 to be inspected can be arranged and an optical system 10 including the sensor 11 for optically measuring the thin film object 21 to be inspected to the table 13 and the standard pattern member. In this case, the holder 30 is equipped with a means for arranging the standard pattern member on the table 13 so that the distance of the standard pattern member to the sensor coincides with the distance of the thin film object 21 to be inspected to the sensor.
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