| 发明名称 |
Spin coating process for prevention of edge buildup |
| 摘要 |
A spin coating process produces a constant film thickness across a planar substrate by placing a frame around the substrate boundary to act as an auxiliary surface to allow a continuous film of the fluid to be spin coated. The auxiliary surface is elevated with respect to the plane of the substrate surface.
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| 申请公布号 |
US4068019(A) |
申请公布日期 |
1978.01.10 |
| 申请号 |
US19760739756 |
申请日期 |
1976.11.08 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BOECKL, RICHARD STEFAN |
| 分类号 |
B05C11/08;B05D1/00;G03F7/16;H01L21/027;(IPC1-7):B05D5/12;B05C13/02 |
主分类号 |
B05C11/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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