发明名称 |
Precision polishing method using hermetically sealed chambers |
摘要 |
A precision polishing apparatus has a first hermetically sealed chamber provided with polishing means, a third hermetically sealed chamber capable of communicating with the first hermetically sealed chamber through a second hermetically sealed chamber, first and second opening-closing means for alternately placing the first and the third hermetically sealed chamber in communication with the second hermetically sealed chamber, and atmosphere pressure control means for controlling the atmosphere pressure of the first and the second hermetically sealed chamber so that the atmosphere pressure of the first hermetically sealed chamber may become lower than the atmosphere pressure of the second hermetically sealed chamber when at least the first opening-closing means is opened.
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申请公布号 |
US6149500(A) |
申请公布日期 |
2000.11.21 |
申请号 |
US19990304629 |
申请日期 |
1999.05.04 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TAKAHASHI, KAZUO;BAN, MIKICHI;NISHIMURA, MATSUOMI |
分类号 |
B24B37/04;B24B37/34;B24B55/00;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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