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发明名称
VORRICHTUNG ZUR ERZEUGUNG INTENSIVER IONENBUENDEL DURCH LADUNGSAUSTAUSCH ZWISCHEN EINEM PLASMA UND EINEM ZU IONISIERENDEN GAS
摘要
申请公布号
DE1917843(B2)
申请公布日期
1978.01.05
申请号
DE19691917843
申请日期
1969.04.08
申请人
发明人
分类号
H01J27/12;(IPC1-7):H01J37/08;H01J3/04
主分类号
H01J27/12
代理机构
代理人
主权项
地址
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