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发明名称
REAKTIONSGEFAESS ZUM ABSCHEIDEN VON HALBLEITERMATERIAL AUF ERHITZTE TRAEGERKOERPER
摘要
申请公布号
DE2358279(B2)
申请公布日期
1978.01.05
申请号
DE19732358279
申请日期
1973.11.22
申请人
发明人
分类号
C01B33/035;C23C16/22;C23C16/44;C30B25/08;(IPC1-7):B01J17/32
主分类号
C01B33/035
代理机构
代理人
主权项
地址
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