| 摘要 |
PURPOSE: An etcher having a measuring unit for measuring an exhaust pressure is provided to prevent an etch defect caused by defective exhaustion, by cleaning an exhaust pipe before the exhaust pipe is stopped up and the exhaustion capacity is reduced. CONSTITUTION: A turbo pump(14) is connected in series to an etch reaction chamber(12) by the first exhaust pipe. A dry pump(16) is connected in series to the turbo pump by the second exhaust pipe. A gas scrubber(18) is connected in series to the dry pump by the third exhaust pipe. The measuring units(20,22,24) for measuring the exhaust pressure are installed in at least two of the first, second and third exhaust pipes.
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