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发明名称
摘要
申请公布号
FR2161959(B1)
申请公布日期
1977.12.30
申请号
FR19720040241
申请日期
1972.11.13
申请人
RCA CORP
发明人
分类号
H01L27/04;G01D5/24;G05F1/56;G05F3/18;H01L21/822;(IPC1-7):G05F1/00;H01L19/00
主分类号
H01L27/04
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代理人
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